Nitrogen Trifluoride
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Cite "Nitrogen Trifluoride"
Nitrogen Trifluoride. (n.d.). In Compound. Retrieved from /id/compound/nitrogen-trifluoride/
"Nitrogen Trifluoride." Compound, /id/compound/nitrogen-trifluoride/.
@misc{nitrogen-trifluoride, title={Nitrogen Trifluoride}, url={/id/compound/nitrogen-trifluoride/}}
IUPAC: Nitrogen trifluoride
CAS: 7783-54-2
Ikhtisar
NF₃ is a colorless gas widely used in the semiconductor industry for plasma etching and chamber cleaning of chemical vapor deposition equipment.
Komposisi
Kegunaan
- • Semiconductor manufacturing
- • Plasma etching
- • CVD chamber cleaning
Fakta Menarik
- ✦ One of the most potent greenhouse gases per molecule known
Keselamatan
- ⚠ Oxidizer
- ⚠ Greenhouse gas (17,200x CO₂)
Structure
SMILES
N(F)(F)F
Sifat
- Jenis
- inorganic
- Keadaan
- gas
- Massa Molar
- 71,00 g/mol
- Kerapatan
- 0,0031 g/cm³
- Titik Lebur
- -206,8 °C
- Titik Didih
- -129,1 °C
- Kelarutan
- slightly soluble
Molecular Descriptors
- Exact Mass
- 70,9983
- XLogP
- 1,9
- TPSA
- 3,2 Ų
- H-Bond Donors
- 0
- H-Bond Acceptors
- 4
- Rotatable Bonds
- 0
- Heavy Atoms
- 4
- Complexity
- 8,0
Frequently Asked Questions
What is Nitrogen Trifluoride?
Nitrogen Trifluoride (NF₃) is a inorganic compound with the IUPAC name Nitrogen trifluoride.
What is the molecular weight of Nitrogen Trifluoride?
Nitrogen Trifluoride has a molar mass of 71.0 g/mol.
What state is Nitrogen Trifluoride at room temperature?
Nitrogen Trifluoride is a gas at room temperature.
Is Nitrogen Trifluoride organic or inorganic?
Nitrogen Trifluoride is classified as an inorganic compound.
What elements make up Nitrogen Trifluoride?
Nitrogen Trifluoride (NF₃) is composed of Nitrogen (N), Fluorine (F).