Nitrogen Trifluoride

NF₃

IUPAC: Nitrogen trifluoride

CAS: 7783-54-2

Overview

NF₃ is a colorless gas widely used in the semiconductor industry for plasma etching and chamber cleaning of chemical vapor deposition equipment.

Composition

Element Symbol Atoms Atomic Mass
Nitrogen N 1 14.0070
Fluorine F 3 18.9980

Elemental Composition

N
Nitrogen ×1
19.7%
F
Fluorine ×3
80.3%

Uses

  • • Semiconductor manufacturing
  • • Plasma etching
  • • CVD chamber cleaning

Fun Facts

  • ✦ One of the most potent greenhouse gases per molecule known

Safety

  • ⚠ Oxidizer
  • ⚠ Greenhouse gas (17,200x CO₂)

Structure

SMILES

N(F)(F)F

Properties

Type
inorganic
State
gas
Molar Mass
71.00 g/mol
Density
0.0031 g/cm³
Melting Point
-206.8 °C
Boiling Point
-129.1 °C
Solubility
slightly soluble

Molecular Descriptors

Exact Mass
70.9983
XLogP
1.9
TPSA
3.2 Ų
H-Bond Donors
0
H-Bond Acceptors
4
Rotatable Bonds
0
Heavy Atoms
4
Complexity
8.0

Related Compounds

Aluminum Chloride

AlCl₃

Aluminum Nitride

AlN

Ammonium Persulfate

(NH₄)₂S₂O₈

Arsine

AsH₃

Barium Ferrite

BaFe₁₂O₁₉

Barium Titanate

BaTiO₃

Boron Nitride

BN

Boron Trichloride

BCl₃

Calcium Aluminate Cement

CaO·Al₂O₃

Calcium Carbide

CaC₂

Frequently Asked Questions

What is Nitrogen Trifluoride?
Nitrogen Trifluoride (NF₃) is a inorganic compound with the IUPAC name Nitrogen trifluoride.
What is the molecular weight of Nitrogen Trifluoride?
Nitrogen Trifluoride has a molar mass of 71.0 g/mol.
What state is Nitrogen Trifluoride at room temperature?
Nitrogen Trifluoride is a gas at room temperature.
Is Nitrogen Trifluoride organic or inorganic?
Nitrogen Trifluoride is classified as an inorganic compound.
What elements make up Nitrogen Trifluoride?
Nitrogen Trifluoride (NF₃) is composed of Nitrogen (N), Fluorine (F).