Nitrogen Trifluoride

NF₃

IUPAC: Nitrogen trifluoride

CAS: 7783-54-2

نظرة عامة

NF₃ is a colorless gas widely used in the semiconductor industry for plasma etching and chamber cleaning of chemical vapor deposition equipment.

التركيب

العنصر الرمز الذرات الكتلة الذرية
Nitrogen N 1 14,0070
Fluorine F 3 18,9980

التركيب العنصري

N
Nitrogen ×1
19,7%
F
Fluorine ×3
80,3%

الاستخدامات

  • • Semiconductor manufacturing
  • • Plasma etching
  • • CVD chamber cleaning

حقائق مثيرة

  • ✦ One of the most potent greenhouse gases per molecule known

السلامة

  • ⚠ Oxidizer
  • ⚠ Greenhouse gas (17,200x CO₂)

Structure

SMILES

N(F)(F)F

الخصائص

النوع
inorganic
الحالة
gas
الكتلة المولية
71,00 g/mol
الكثافة
0,0031 g/cm³
نقطة الانصهار
-206,8 °C
نقطة الغليان
-129,1 °C
الذوبانية
slightly soluble

Molecular Descriptors

Exact Mass
70,9983
XLogP
1,9
TPSA
3,2 Ų
H-Bond Donors
0
H-Bond Acceptors
4
Rotatable Bonds
0
Heavy Atoms
4
Complexity
8,0

مركبات ذات صلة

Diborane

B₂H₆

Arsine

AsH₃

Boron Trichloride

BCl₃

Cisplatin

Pt(NH₃)₂Cl₂

Gallium Arsenide

GaAs

Barium Ferrite

BaFe₁₂O₁₉

Barium Titanate

BaTiO₃

Calcium Aluminate Cement

CaO·Al₂O₃

Aluminum Nitride

AlN

Aluminum Chloride

AlCl₃

Frequently Asked Questions

What is Nitrogen Trifluoride?
Nitrogen Trifluoride (NF₃) is a inorganic compound with the IUPAC name Nitrogen trifluoride.
What is the molecular weight of Nitrogen Trifluoride?
Nitrogen Trifluoride has a molar mass of 71.0 g/mol.
What state is Nitrogen Trifluoride at room temperature?
Nitrogen Trifluoride is a gas at room temperature.
Is Nitrogen Trifluoride organic or inorganic?
Nitrogen Trifluoride is classified as an inorganic compound.
What elements make up Nitrogen Trifluoride?
Nitrogen Trifluoride (NF₃) is composed of Nitrogen (N), Fluorine (F).