Nitrogen Trifluoride

NF₃

IUPAC: Nitrogen trifluoride

CAS: 7783-54-2

Aperçu

NF₃ is a colorless gas widely used in the semiconductor industry for plasma etching and chamber cleaning of chemical vapor deposition equipment.

Composition

Élément Symbole Atomes Masse atomique
Nitrogen N 1 14,0070
Fluorine F 3 18,9980

Composition élémentaire

Usages

  • Semiconductor manufacturing
  • Plasma etching
  • CVD chamber cleaning

Le saviez-vous

  • One of the most potent greenhouse gases per molecule known

Sécurité

  • ⚠ Oxidizer
  • ⚠ Greenhouse gas (17,200x CO₂)

Structure

SMILES

N(F)(F)F

Propriétés

Type
inorganic
État
gas
Masse molaire
71,00 g/mol
Densité
0,0031 g/cm³
Point de fusion
-206,8 °C
Point d'ébullition
-129,1 °C
Solubilité
slightly soluble

Molecular Descriptors

Exact Mass
70,9983
XLogP
1,9
TPSA
3,2 Ų
H-Bond Donors
0
H-Bond Acceptors
4
Rotatable Bonds
0
Heavy Atoms
4
Complexity
8,0

Frequently Asked Questions

What is Nitrogen Trifluoride?
Nitrogen Trifluoride (NF₃) is a inorganic compound with the IUPAC name Nitrogen trifluoride.
What is the molecular weight of Nitrogen Trifluoride?
Nitrogen Trifluoride has a molar mass of 71.0 g/mol.
What state is Nitrogen Trifluoride at room temperature?
Nitrogen Trifluoride is a gas at room temperature.
Is Nitrogen Trifluoride organic or inorganic?
Nitrogen Trifluoride is classified as an inorganic compound.
What elements make up Nitrogen Trifluoride?
Nitrogen Trifluoride (NF₃) is composed of Nitrogen (N), Fluorine (F).