Nitrogen Trifluoride

NF₃

IUPAC: Nitrogen trifluoride

CAS: 7783-54-2

概要

NF₃ is a colorless gas widely used in the semiconductor industry for plasma etching and chamber cleaning of chemical vapor deposition equipment.

組成

元素 記号 原子 原子質量
Nitrogen N 1 14.0070
Fluorine F 3 18.9980

元素組成

N
Nitrogen ×1
19.7%
F
Fluorine ×3
80.3%

用途

  • • Semiconductor manufacturing
  • • Plasma etching
  • • CVD chamber cleaning

豆知識

  • ✦ One of the most potent greenhouse gases per molecule known

安全性

  • ⚠ Oxidizer
  • ⚠ Greenhouse gas (17,200x CO₂)

Structure

SMILES

N(F)(F)F

特性

タイプ
inorganic
状態
gas
モル質量
71.00 g/mol
密度
0.0031 g/cm³
融点
-206.8 °C
沸点
-129.1 °C
溶解度
slightly soluble

Molecular Descriptors

Exact Mass
70.9983
XLogP
1.9
TPSA
3.2 Ų
H-Bond Donors
0
H-Bond Acceptors
4
Rotatable Bonds
0
Heavy Atoms
4
Complexity
8.0

関連化合物

Diborane

B₂H₆

Arsine

AsH₃

Boron Trichloride

BCl₃

Cisplatin

Pt(NH₃)₂Cl₂

Gallium Arsenide

GaAs

Barium Ferrite

BaFe₁₂O₁₉

Barium Titanate

BaTiO₃

Calcium Aluminate Cement

CaO·Al₂O₃

Aluminum Nitride

AlN

Aluminum Chloride

AlCl₃

Frequently Asked Questions

What is Nitrogen Trifluoride?
Nitrogen Trifluoride (NF₃) is a inorganic compound with the IUPAC name Nitrogen trifluoride.
What is the molecular weight of Nitrogen Trifluoride?
Nitrogen Trifluoride has a molar mass of 71.0 g/mol.
What state is Nitrogen Trifluoride at room temperature?
Nitrogen Trifluoride is a gas at room temperature.
Is Nitrogen Trifluoride organic or inorganic?
Nitrogen Trifluoride is classified as an inorganic compound.
What elements make up Nitrogen Trifluoride?
Nitrogen Trifluoride (NF₃) is composed of Nitrogen (N), Fluorine (F).