Nitrogen Trifluoride

NF₃

IUPAC: Nitrogen trifluoride

CAS: 7783-54-2

Обзор

NF₃ is a colorless gas widely used in the semiconductor industry for plasma etching and chamber cleaning of chemical vapor deposition equipment.

Состав

Элемент	Символ	Атомы	Атомная масса
Nitrogen	N	1	14,0070
Fluorine	F	3	18,9980

Элементный состав

Nitrogen ×1

19,7%

Fluorine ×3

80,3%

Применение

• Semiconductor manufacturing
• Plasma etching
• CVD chamber cleaning

Интересные факты

✦ One of the most potent greenhouse gases per molecule known

Безопасность

⚠ Oxidizer
⚠ Greenhouse gas (17,200x CO₂)

Structure

SMILES

N(F)(F)F

Свойства

Тип: inorganic
Состояние: gas
Молярная масса: 71,00 g/mol
Плотность: 0,0031 g/cm³
Температура плавления: -206,8 °C
Температура кипения: -129,1 °C
Растворимость: slightly soluble

Molecular Descriptors

Exact Mass: 70,9983
XLogP: 1,9
TPSA: 3,2 Å²
H-Bond Donors: 0
H-Bond Acceptors: 4
Rotatable Bonds: 0
Heavy Atoms: 4
Complexity: 8,0

Связанные соединения

Diborane

B₂H₆

Arsine

AsH₃

Boron Trichloride

BCl₃

Cisplatin

Pt(NH₃)₂Cl₂

Gallium Arsenide

GaAs

Barium Ferrite

BaFe₁₂O₁₉

Barium Titanate

BaTiO₃

Calcium Aluminate Cement

CaO·Al₂O₃

Aluminum Nitride

AlN

Aluminum Chloride

AlCl₃

Frequently Asked Questions

What is Nitrogen Trifluoride?

Nitrogen Trifluoride (NF₃) is a inorganic compound with the IUPAC name Nitrogen trifluoride.

What is the molecular weight of Nitrogen Trifluoride?

Nitrogen Trifluoride has a molar mass of 71.0 g/mol.

What state is Nitrogen Trifluoride at room temperature?

Nitrogen Trifluoride is a gas at room temperature.

Is Nitrogen Trifluoride organic or inorganic?

Nitrogen Trifluoride is classified as an inorganic compound.

What elements make up Nitrogen Trifluoride?

Nitrogen Trifluoride (NF₃) is composed of Nitrogen (N), Fluorine (F).