Nitrogen Trifluoride

NF₃

IUPAC: Nitrogen trifluoride

CAS: 7783-54-2

Tổng quan

NF₃ is a colorless gas widely used in the semiconductor industry for plasma etching and chamber cleaning of chemical vapor deposition equipment.

Thành phần

Nguyên tố Ký hiệu Nguyên tử Khối lượng nguyên tử
Nitrogen N 1 14,0070
Fluorine F 3 18,9980

Thành phần nguyên tố

N
Nitrogen ×1
19,7%
F
Fluorine ×3
80,3%

Công dụng

  • • Semiconductor manufacturing
  • • Plasma etching
  • • CVD chamber cleaning

Sự thật thú vị

  • ✦ One of the most potent greenhouse gases per molecule known

An toàn

  • ⚠ Oxidizer
  • ⚠ Greenhouse gas (17,200x CO₂)

Structure

SMILES

N(F)(F)F

Tính chất

Loại
inorganic
Trạng thái
gas
Khối lượng mol
71,00 g/mol
Mật độ
0,0031 g/cm³
Điểm nóng chảy
-206,8 °C
Điểm sôi
-129,1 °C
Độ hòa tan
slightly soluble

Molecular Descriptors

Exact Mass
70,9983
XLogP
1,9
TPSA
3,2 Ų
H-Bond Donors
0
H-Bond Acceptors
4
Rotatable Bonds
0
Heavy Atoms
4
Complexity
8,0

Hợp chất liên quan

Diborane

B₂H₆

Arsine

AsH₃

Boron Trichloride

BCl₃

Cisplatin

Pt(NH₃)₂Cl₂

Gallium Arsenide

GaAs

Barium Ferrite

BaFe₁₂O₁₉

Barium Titanate

BaTiO₃

Calcium Aluminate Cement

CaO·Al₂O₃

Aluminum Nitride

AlN

Aluminum Chloride

AlCl₃

Frequently Asked Questions

What is Nitrogen Trifluoride?
Nitrogen Trifluoride (NF₃) is a inorganic compound with the IUPAC name Nitrogen trifluoride.
What is the molecular weight of Nitrogen Trifluoride?
Nitrogen Trifluoride has a molar mass of 71.0 g/mol.
What state is Nitrogen Trifluoride at room temperature?
Nitrogen Trifluoride is a gas at room temperature.
Is Nitrogen Trifluoride organic or inorganic?
Nitrogen Trifluoride is classified as an inorganic compound.
What elements make up Nitrogen Trifluoride?
Nitrogen Trifluoride (NF₃) is composed of Nitrogen (N), Fluorine (F).