삼플루오린화질소
NF₃Cite "삼플루오린화질소"
삼플루오린화질소. (n.d.). In Compound. Retrieved from /ko/compound/nitrogen-trifluoride/
"삼플루오린화질소." Compound, /ko/compound/nitrogen-trifluoride/.
@misc{, title={삼플루오린화질소}, url={/ko/compound/nitrogen-trifluoride/}}
IUPAC: Nitrogen trifluoride
CAS: 7783-54-2
개요
NF₃ is a colorless gas widely used in the semiconductor industry for plasma etching and chamber cleaning of chemical vapor deposition equipment.
구성
용도
- • Semiconductor manufacturing
- • Plasma etching
- • CVD chamber cleaning
흥미로운 사실
- ✦ One of the most potent greenhouse gases per molecule known
안전
- ⚠ Oxidizer
- ⚠ Greenhouse gas (17,200x CO₂)
구조
SMILES
N(F)(F)F
성질
- 유형
- inorganic
- 상태
- gas
- 몰 질량
- 71.00 g/mol
- 밀도
- 0.0031 g/cm³
- 녹는점
- -206.8 °C
- 끓는점
- -129.1 °C
- 용해도
- slightly soluble
분자 기술자
- 정확 질량
- 70.9983
- XLogP
- 1.9
- TPSA
- 3.2 Ų
- 수소결합 주개
- 0
- 수소결합 받개
- 4
- 회전 가능 결합
- 0
- 중원자
- 4
- 복잡도
- 8.0
Frequently Asked Questions
What is 삼플루오린화질소?
삼플루오린화질소 (NF₃) is a inorganic compound with the IUPAC name Nitrogen trifluoride.
What is the molecular weight of 삼플루오린화질소?
삼플루오린화질소 has a molar mass of 71.0 g/mol.
What state is 삼플루오린화질소 at room temperature?
삼플루오린화질소 is a gas at room temperature.
Is 삼플루오린화질소 organic or inorganic?
삼플루오린화질소 is classified as an inorganic compound.
What elements make up 삼플루오린화질소?
삼플루오린화질소 (NF₃) is composed of 질소 (N), 플루오린 (F).